MSE PRO Titanium Sputtering Target Ti

Description for Titanium Sputtering Target

Titanium is a material that is widely used in watches, biomedical implants, drill bits, laptops, etc. In its pure metal form, Titanium is lustrous and silvery-white in appearance. Titanium has a melting point of °C, a density of 4.5 g/cc, and a vapor pressure of 10-4 Torr at 1,453°C. It is a sturdy material and can be easily fabricated when heated. Its strong, lightweight characteristics and excellent corrosion resistance make it ideal for ocean liner hulls, aircraft engines, and designer jewelry. Titanium is a biocompatible material and therefore it has been used in surgical tools and medical implants. Titanium is generally evaporated in vacuum and deposited as coatings for the purposes of wear and decorative, semiconductor, and optical applications.

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Customized Titanium sputtering targets are available upon request. We can custom make the Ti sputtering targets to meet customer's specific requirements and drawings.

Specifications for Titanium Sputtering Target

Name: Titanium
Symbol: Ti
Atomic Number: 22
Atomic Mass: 47.867 amu
Melting Point: .0 °C (.15 K, .0

°

F)
Boiling Point: .0

°

C (.15 K, .6

°

F)

Number of Protons/Electrons: 22 Number of Neutrons: 26
Classification: Transition Metal
Crystal Structure: Hexagonal
Density @ 293 K: 4.54 g/cm3               

Color: silverish

Titanium Sputtering Targets ( Ti target )

• Material: High purity (99.5%, 99.995%), ASTM grade 1, ASTM grade 2,

  TiAl

  6

  V

  4
• Standard: ASTM B 337/B338, ASTM B385-91,ASTM381, ISO /2,JIS H,Din
• Shape: Discs (Diameter <350mm), Thickness>1mm Rectangle (Length mm, Width 400mm Thickness>1mm Tube ( Rotory target, OD: 20mm~160mm, Thickness: 2-20mm, Length: custom-made OD>160, Thickness >8mm, length <200)
• Application: Deposited film nitride as Decorate thin film, Deposited film oxidized to TiO2 as beam splitter or insulator

Titanium Pellet (Evaporation Material)

• Material: High purity (99.99%, 99.995%), ASTM grade 1, ASTM grade 2, TiAl6V4
• Standard: ASTM B 337/B338, ASTM B385-91,ASTM381, ISO /2,JIS H,Din
• Shape: Pellet, Slug
• Dimension: 3X3mm, 6X6mm, 3X8mm

Typical analysis for 99.995% Purity, Analysis by GDMS

Element

ppm

Element

ppm

Li

<0.01

Nb

<0.2

Be

<0.005

Mo

<0.5

B

<0.01

Ru

<0.01

Na

<0.01

Rh

<0.05

Mg

0.05

Pd

<0.01

Al

0.01

Ag

<0.05

Si

0.21

Cd

<0.05

P

<0.01

In

<0.05

S

0.02

Sn

<0.05

K

<0.01

Sb

<0.05

Ca

<0.2

Te

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<0.05

Sc

<0.05

Ba

<0.005

V

0.01

Ce

<0.005

Cr

0.06

Hf

<0.01

Mn

0.06

Ta

< 2

Fe

1.5

W

<0.01

Co

<0.01

Re

<0.01

Ni

0.16

Os

<0.01

Cu

0.2

Ir

<0.01

Zn

<0.05

Pt

<0.05

Ga

<0.05

Au

<0.05

Ge

<0.05

Hg

<0.1

As

0.02

Pb

<0.01

Se

<0.05

Bi

<0.01

Zr

<0.05

Th

<0.

 

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